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| Artikel-Nr.: 5667A-9783030797515 Herst.-Nr.: 9783030797515 EAN/GTIN: 9783030797515 |
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| This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Weitere Informationen: | | Author: | Zhuoqing Yang | Verlag: | Springer International Publishing | Sprache: | eng |
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| Weitere Suchbegriffe: maschinenbau und fertigungstechnik, MOEMS; Micromaching; nano fabrication; Advanced Manufacturing; biomedical applications; IoT; Nanomaterials; Microfluidic; Micro fabrication, MEMS, MOEMS, NEMS, Micromaching, Micro fabrication, Nano fabrication, Sensors, Advanced manufacturing, Biomedical applications, IoT |
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