Cluster Beam Synthesis of Nanostructured Materials

1. Introduction.- 2. Molecular Beams and Cluster Nucleation.- 2.1 Molecular Beams.- 2.2 Nucleation and Aggregation Processes.- 3. Cluster Sources.- 3.1 Vaporization Methods.- 3.2 Continuous Sources.- 3.3 Pulsed Sources.- 4. Characterization and Manipulation of Cluster Beams.- 4.1 Mass Spectrometry.- 4.2 Detection Methods.- 4.3 Cluster Selection and Manipulation.- 5. Thin Film Deposition and Surface Modification by Cluster Beams.- 5.1 Kinetic Energy Regimes.- 5.2 Diffusion and Coalescence of Clusters on Surfaces.- 5.3 Low-Energy Deposition.- 5.4 High-Energy Deposition.- 6. Outlook and Perspectives.- 6.1 Cluster Beam Processing of Surfaces.- 6.2 Nanostructured Materials Synthesis.- 6.3 Perspectives.- References.