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| Artikel-Nr.:
5667A-9783642060489 Herst.-Nr.:
9783642060489 EAN/GTIN:
9783642060489 |
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| Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications. Weitere Informationen: | | Author: | Joachim Frühauf | Verlag: | Springer Berlin | Sprache: | eng |
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| Weitere Suchbegriffe: maschinenbau und fertigungstechnik, Design of etch masks and processes, Microfluidics, Micromechanics, Microoptics, Microtechnologies, Sensor, Silicon Etching, Silicon Microstructures, sensors, Design of etch masks and processes; Microfluidics; Microoptics; Microtechnologies; Sensor; Sensors; Silicon Etching; Silicon Microstructures; micromechanics |
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