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| Artikel-Nr.:
5667A-9783642317750 Herst.-Nr.:
9783642317750 EAN/GTIN:
9783642317750 |
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| Multilayer Integrated Film Bulk Acoustic Resonators Weitere Informationen: | | Author: | Yafei Zhang; Da Chen | Verlag: | Springer Berlin | Sprache: | eng |
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| Weitere Suchbegriffe: chemische technik - englischsprachig, Festkörperphysik, Nanotechnologie, Technologie / Nanotechnologie, Device Theory and Design Principle; Film Bulk Acoustic Resonator; Micro-nano Manufacturing; Microelectronic Device; Multilayer Integration; Sensors and actuators, Device Theory and Design Principle, Film Bulk Acoustic Resonator, Micro-nano Manufacturing, Microelectronic Device, Multilayer Integration, Sensors and Actuators |
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